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Deposition of thin films by sputtering (Record no. 387963)

000 -LEADER
fixed length control field 00456pam a2200157a 44500
040 ## - CATALOGING SOURCE
Transcribing agency IITK
041 ## - LANGUAGE CODE
Language code of text/sound track or separate title eng
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 669.0284
Item number Sy68p
111 ## - MAIN ENTRY--MEETING NAME
Meeting name or jurisdiction name as entry element Symposium on the deposition of thin films by sputtering
Location of meeting Newyork
Date of meeting 1967
Number of part/section/meeting 2nd
245 1# - TITLE STATEMENT
Title Deposition of thin films by sputtering
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication New York
Name of publisher Rochester
Year of publication 1967
300 ## - PHYSICAL DESCRIPTION
Number of Pages 146
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Sputtering (Physics) -- Congresses
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical Term Ion Bombardment -- Congresses
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Koha item type Books
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection code Permanent Location Current Location Date acquired Full call number Accession Number Koha item type
        General Stacks PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 2012-07-08 669.0284 Sy68p K14140 Books

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