| 000 -LEADER |
|---|
| fixed length control field |
00638pam a2200205a 44500 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3817 |
| Item number |
B911f |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Burger, Robert M. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
FUNDAMENTALS OF SILICON INTEGRATED DEVICE TECHNOLOGY |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Englewood Cliffs, N. J. |
| Name of publisher, distributor, etc. |
Prentice-Hall |
| Date of publication, distribution, etc. |
1967- |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
v. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Solid State Physical Electronics Series |
| Volume/sequential designation |
|
| 500 ## - GENERAL NOTE |
|---|
| General note |
Contents : V. 1. Oxidation, Diffusion And Epitaxy |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes Bibliographies |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Prentice-Hall Electrical Engineering Series |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Donovan, R. P. |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
K13849 v. 1 s C |
