| 000 -LEADER |
|---|
| fixed length control field |
00446ngm a2200145 454500 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
A161303 |
| Item number |
GA3.1 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Characterization and Metrology for ULSI Technology 2005 [Electronic resource] |
| Remainder of title |
AIP Conference Proceedings 788 |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
|
| Date of publication, distribution, etc. |
|
| 500 ## - GENERAL NOTE |
|---|
| General note |
Complete Proceedings In Pdf Format |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Seiler, David G. [Ed.] |
| 953 ## - |
|---|
| -- |
CD-ROM accompanied with Book |
| 997 ## - |
|---|
| -- |
ER3828 CARS R |
