000 -LEADER |
fixed length control field |
00498ngm a2200169 454500 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
A158049 |
Item number |
GA2.4 |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Chen, Francis F |
110 ## - MAIN ENTRY--CORPORATE NAME |
Corporate name or jurisdiction name as entry element |
Chang, Jane P |
245 1# - TITLE STATEMENT |
Title |
Lecture notes on principles of plasma processing |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
New York |
Name of publisher, distributor, etc. |
Kluwer Academic |
Date of publication, distribution, etc. |
2003 |
500 ## - GENERAL NOTE |
General note |
Win98 Or Later And Adobe Acrobat Or Adobe Reader Required. |
500 ## - GENERAL NOTE |
General note |
29 Mb |
500 ## - GENERAL NOTE |
General note |
Interactive Pdf |
690 ## - LOCAL SUBJECT ADDED ENTRY--TOPICAL TERM (OCLC, RLIN) |
Topical term or geographic name as entry element |
621.044 C421L |
953 ## - |
-- |
CD-ROM accompanied with Book |
997 ## - |
-- |
ER3533 CARS R |