| 000 -LEADER |
|---|
| fixed length control field |
00664pam a2200205a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2013 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783527335015 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
P K Kelkar Library, IIT Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
R279 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 0# - TITLE STATEMENT |
|---|
| Title |
Reliability of MEMS |
| Remainder of title |
testing of materials and devices |
| Statement of responsibility, etc. |
edited by Osamu Tabata and Toshiyuki Tsuchiya |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Germany |
| Name of publisher, distributor, etc. |
Wiley-Vch |
| Date of publication, distribution, etc. |
2013 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xx, 303p |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Advanced Micro And Nanosystems |
| Volume/sequential designation |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems -- Reliability. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
MEMS. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Tabata, Osamu, Ed. |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Toshiyuki, Tsuchiya, Ed. |
| 997 ## - |
|---|
| -- |
A180313 C |
