| 000 -LEADER |
|---|
| fixed length control field |
00672pam a2200205a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2004 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783540204817 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
P K Kelkar Library, IIT Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3 |
| Item number |
P912 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 0# - TITLE STATEMENT |
|---|
| Title |
Predictive simulation of semiconductor processing |
| Remainder of title |
status and challenges |
| Statement of responsibility, etc. |
edited by J. Dabrowski and E. R. Weber |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Berlin |
| Name of publisher, distributor, etc. |
Springer |
| Date of publication, distribution, etc. |
2004 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvii, 490p |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Springer Series In Materials Science / Edited By R. Hull |
| Volume/sequential designation |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Transistor. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Atomare Bewegung. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Computersimulation |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Dabrowski, J., Ed. |
| 997 ## - |
|---|
| -- |
A179494 s C |
