000 -LEADER |
fixed length control field |
00616pam a2200181a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408b2010 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9780815515944 |
040 ## - CATALOGING SOURCE |
Original cataloging agency |
IIT, Kanpur |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.38152 |
Item number |
H191 |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
|
245 1# - TITLE STATEMENT |
Title |
Handbook of silicon based MEMS materials and technologies |
Statement of responsibility, etc. |
edited by Veikko Lindroos ...[et al.] |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
Amsterdam |
Name of publisher, distributor, etc. |
Elsevier |
Date of publication, distribution, etc. |
2010 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xxxii, 636p |
440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
Title |
Micro & Nano Technologies / Edited By Jeremy Ramsden |
Volume/sequential designation |
|
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Microelectronical systems -- Materials |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Lindroos, Veikko |
997 ## - |
-- |
A168960 C |