| 000 -LEADER |
|---|
| fixed length control field |
00561pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2008 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9789812568236 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
Y8s |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Yoo, Chue San |
| 245 0# - TITLE STATEMENT |
|---|
| Title |
Semiconductor manufacturing technology |
| Statement of responsibility, etc. |
Chue San Yoo |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New Jersey |
| Name of publisher, distributor, etc. |
World Scientific |
| Date of publication, distribution, etc. |
2008 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 470p |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Advanced Series In Electrical And Computer Engineering / Edited By W.K. Chen |
| Volume/sequential designation |
V.13 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductor |
| 997 ## - |
|---|
| -- |
A168550 C |
