| 000 -LEADER |
|---|
| fixed length control field |
00628pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2009 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781420043761 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
D361 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Defects in microelectronic materials and devices |
| Statement of responsibility, etc. |
edited by Daniel M. Fleetwood, Sokrates T. Pantelides and Ronald D. Schrimpf |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Boca Raton |
| Name of publisher, distributor, etc. |
Crc Press |
| Date of publication, distribution, etc. |
2009 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xvi, 753p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics - Materials - Testing |
| 651 ## - SUBJECT ADDED ENTRY--GEOGRAPHIC NAME |
|---|
| Geographic name |
Integrated circuits - Defects |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Fleetwood, Daniel M., Ed. |
| 997 ## - |
|---|
| -- |
A165011 C |
