| 000 -LEADER |
|---|
| fixed length control field |
00536pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2006 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783527312467 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
670.42 |
| Item number |
M583 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 ## - TITLE STATEMENT |
|---|
| Title |
Micro process engineering |
| Remainder of title |
fundamentals, devices, fabrication, and applications |
| Statement of responsibility, etc. |
edited by Norbert Kockman |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Weinheim |
| Name of publisher, distributor, etc. |
Wiley-Vch |
| Date of publication, distribution, etc. |
2006 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxii, 507p. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Advanced Micro And Nanosystems |
| Volume/sequential designation |
V.5 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Product Engineering |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Kockman, Norbert,Ed. |
| 997 ## - |
|---|
| -- |
A162364 v.5 C |
