| 000 -LEADER |
|---|
| fixed length control field |
00489pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2008 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9783540766629 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
R22 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 1# - TITLE STATEMENT |
|---|
| Title |
Reactive sputter deposition |
| Statement of responsibility, etc. |
edited by D. Depla |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Berlin |
| Name of publisher, distributor, etc. |
Springer |
| Date of publication, distribution, etc. |
2008 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xviii, 570p. |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Springer Series In Materials Science |
| Volume/sequential designation |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Cathode Sputtering (Plating Process) |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Mahieu, S.,Ed. |
| 997 ## - |
|---|
| -- |
A161826 s C |
