| 000 -LEADER |
|---|
| fixed length control field |
00458pam a2200157a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2008 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780470083017 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
H859m2 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Hsu, Tai-Ran |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
MEMS and microsystems |
| Remainder of title |
design, manufacture and nanoscale engineering |
| Statement of responsibility, etc. |
Tai-Ran Hsu |
| 250 ## - EDITION STATEMENT |
|---|
| Edition statement |
2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New Jersey |
| Name of publisher, distributor, etc. |
John Wiley |
| Date of publication, distribution, etc. |
2008 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxv, 550p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics |
| 997 ## - |
|---|
| -- |
A161984 C |
