| 000 -LEADER |
|---|
| fixed length control field |
00754pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2008 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
978044452194 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
620.004 |
| Item number |
C738 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 1# - TITLE STATEMENT |
|---|
| Title |
Comprehensive microsystems |
| Statement of responsibility, etc. |
edited by Yogesh B. Gianchandani, Osamu Tabata [and] Hans Zappe |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Amsterdam |
| Name of publisher, distributor, etc. |
Elsevier |
| Date of publication, distribution, etc. |
2008 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
3V. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Contents: V.1.Materials Fabrication And System Design - V.2.Actuation Mechanism Physical Sensing Chemical And Biological Systems- V.3.Optical Systems Industrial Applications Emerging Topics. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics2.Optical Detectors -- Industrial Applications3.Microelectromechanical |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Hans Zappe, Ed. |
| 997 ## - |
|---|
| -- |
A160312 s C A160313 s C A160314 s C |
