000 -LEADER |
fixed length control field |
00572pam a2200193a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408b2007 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
9783527406333 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
620.5 |
Item number |
OS7P |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Ostrikov,Kostya (Ken) |
245 1# - TITLE STATEMENT |
Title |
PLASMA-AIDED NANOFABRICATION |
Statement of responsibility, etc. |
FROM PLASMA SOURCES TO NANOASSEMBLY |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
|
Name of publisher, distributor, etc. |
Wiley-Vch Verlag Gmbh & Co. Kgaa, Weinheim |
Date of publication, distribution, etc. |
2007 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
xiii,300 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Nanostructured Materials |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Plasma Engineering |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Low Temperature Plasma |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Xu,Shuyan |
964 ## - |
-- |
CIRC |
997 ## - |
-- |
A159628 s C |