| 000 -LEADER |
|---|
| fixed length control field |
00767pam a2200217a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2004 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0819452521 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
M519 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Janson,Siegfried W |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Spie-The International Soc. For Optical Engg., Washington |
| Date of publication, distribution, etc. |
2004 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxxi,232 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Proceedings Of Spie--The International Society For Optical Engineering |
| Volume/sequential designation |
|
| 500 ## - GENERAL NOTE |
|---|
| General note |
Sponsored By Spie-The International Society For Optical Engineering |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes Index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical Systems--Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Optoelectronic Devices--Congresses |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Henning,Albert K |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A150778 C |
