| 000 -LEADER |
|---|
| fixed length control field |
00517pam a2200193a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2005 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3527310800 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.3815 |
| Item number |
C62 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Brand,O. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
CMOS-MEMS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Wiley-Vch, Weinheim |
| Date of publication, distribution, etc. |
2005 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv,594 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Advanced Micro & Nanosystems |
| Volume/sequential designation |
|
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Metal Oxide Semiconductors, Complementary |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical Systems |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Fedder,G. K. |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A151623 C |
