| 000 -LEADER |
|---|
| fixed length control field |
00541pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2004 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0815514832 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
W269T |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Wasa,Kiyotaka,Kitabatake,Makoto |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
THIN FLIM MATERIALS TECHNOLOGY |
| Statement of responsibility, etc. |
SPUTTERING OF COMPOUND MATERIALS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
William Andrew Pub., Norwich, Ny |
| Date of publication, distribution, etc. |
2004 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv,518 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Cathode Sputtering (Planing Process) |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Thin Films |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Adachi,Hideaki |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A149502 C |
