| 000 -LEADER |
|---|
| fixed length control field |
00512pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2005 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| ISBN |
184265151X |
| 040 ## - CATALOGING SOURCE |
|---|
| Transcribing agency |
IITK |
| 041 ## - LANGUAGE CODE |
|---|
| Language code of text/sound track or separate title |
eng |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
K837p |
| 100 ## - MAIN ENTRY--AUTHOR NAME |
|---|
| Personal name |
Konuma, Mitsuharu |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
Plasma techniques for film deposition |
| Statement of responsibility, etc |
by Mitsuharu Konuma |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Name of publisher |
Alpha Science International Ltd. |
| Year of publication |
2005 |
| Place of publication |
Harrow |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Number of Pages |
ix, 337p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Thin Films |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical Term |
Plasma-Enhanced Chemical Vapor Deposition |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Books |
