| 000 -LEADER |
|---|
| fixed length control field |
00513pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2003 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3540002529 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
M72N |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Nassar,Raja |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
MODELLING OF MICROFABRICATION SYSTEMS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Springer-Verlag, Berlin |
| Date of publication, distribution, etc. |
2003 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
x,269 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics -- Mathematical Models |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated Circuits -- Mathematical Models |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Dai,Weizhong |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A145684 C |
