| 000 -LEADER |
|---|
| fixed length control field |
00488pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408bc2002 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0444510958 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
530.044 |
| Item number |
AD95 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
T Makabe,No |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
ADVANCES IN LOW TEMPERATURE RF PLASMAS |
| Statement of responsibility, etc. |
BASIS FOR PROCESS DESIGN |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
Elsevier, Amsterdam |
| Date of publication, distribution, etc. |
c2002 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii,341 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Low Temperature Plasmas -- Industrial Applications |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Makabe,T |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A141744 C |
