| 000 -LEADER |
|---|
| fixed length control field |
00532pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2001 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0792372468 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
Se59m |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Senturia, Stephen D. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
Microsystem design |
| Statement of responsibility, etc. |
Stephen D. Senturia |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Boston |
| Name of publisher, distributor, etc. |
Kluwer Academic Publishers |
| Date of publication, distribution, etc. |
2001 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xix, 689p. |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical Systems--Design And Construction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
System Design |
| 997 ## - |
|---|
| -- |
A140068 C |
