| 000 -LEADER |
|---|
| fixed length control field |
00497pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1989 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0852742703 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38171 |
| Item number |
G919m |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Grovenor, C. R. M. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
MICROELECTRONIC MATERIALS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Bristol |
| Name of publisher, distributor, etc. |
Institute Of Physics |
| Date of publication, distribution, etc. |
1989 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
x,544 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes Bibliographical References And Index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronic Devices. Design And Manufacture |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A116692 C |
