000 -LEADER |
fixed length control field |
00469pam a2200181a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408b1989 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
087495754 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
537.622 |
Item number |
St52i |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Stievenard, D. |
245 1# - TITLE STATEMENT |
Title |
ION IMPLANTATION IN SEMICONDUCTORS |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
Aedermanndorf |
Name of publisher, distributor, etc. |
Trans Tech. Pub. |
Date of publication, distribution, etc. |
1989 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
437 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Ion Inpalntation |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Semiconductors |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Bourgoin, J. C. |
964 ## - |
-- |
CIRC |
997 ## - |
-- |
A106800 C |