| 000 -LEADER |
|---|
| fixed length control field |
00450pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1980 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
047107828X |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
537.52 |
| Item number |
C366g |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Chapman, Brian |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
GLOW DISCHARGE PROCESSES |
| Statement of responsibility, etc. |
SPUTTERING AND PLASMA ETCHING |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Wiley |
| Date of publication, distribution, etc. |
1980 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv,406 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Sputtering (Physics) |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Glow Discharges |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A103083 C |
