000 -LEADER |
fixed length control field |
00616pam a2200205a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408b1986 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0841214069 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
668.9 |
Item number |
P769 |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Bowden, Murrae |
245 1# - TITLE STATEMENT |
Title |
POLYMERS AND HIGH TECHNOLOGY |
Statement of responsibility, etc. |
ELECTRONICS AND PHOTONICS |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
Anaheim |
Name of publisher, distributor, etc. |
California |
Date of publication, distribution, etc. |
1986 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
x,628 |
440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
Title |
Acs Symposium Series, Issn 0097-6156-346 |
Volume/sequential designation |
|
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Polymers And Polymerization -- Cong |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Photoresists -- Cong |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Microlithography-Materials -- Cong |
700 ## - ADDED ENTRY--PERSONAL NAME |
Personal name |
Turner, S. Richard |
964 ## - |
-- |
CIRC |
997 ## - |
-- |
A106684 C |