| 000 -LEADER |
|---|
| fixed length control field |
00613pam a2200193a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1987 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
3540179518 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.366 |
| Item number |
B692L |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Boyd, Ian W. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
LASER PROCESSING OF THIN FILMS AND MICROSTRUCTURES |
| Statement of responsibility, etc. |
OXIDATION, DEPOSITION AND ETCHING OF INSULATORS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Amsterdam |
| Name of publisher, distributor, etc. |
Ios |
| Date of publication, distribution, etc. |
1987 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
viii,320 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Springer Series In Materials Science/Ed. Mooradian, Aram |
| Volume/sequential designation |
V. 3 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Lasers -- Industrial Applications |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Thin Films |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microstructure |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A103560 s C |
