| 000 -LEADER |
|---|
| fixed length control field |
00473pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1982 xxu||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
L333 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Poate, J. M. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
LASER ANNEALING OF SEMICONDUCTORS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Academic Press |
| Date of publication, distribution, etc. |
1982 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi,564 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductor Industry -- Laser Use In -- Congresses |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Mayer, James W. |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A83855 s C |
