| 000 -LEADER |
|---|
| fixed length control field |
00610pam a2200193a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1971 xxu||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
H191 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Milek, John T. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
SILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Ifi/Plenum |
| Date of publication, distribution, etc. |
1971 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
v.2 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Handbook Of Electronic Materials |
| Volume/sequential designation |
V. 3 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Contents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Silicon Nitride |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Electronics -- Materials |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A32959 v. 6 s C |
