| 000 -LEADER |
|---|
| fixed length control field |
00498pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1970 xxu||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
M452i |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Mayer, James W. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
ION IMPLANTATION IN SEMICONDUCTORS |
| Statement of responsibility, etc. |
SILICON AND GERMANIUM |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Academic Press |
| Date of publication, distribution, etc. |
1970 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
280 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes Bibliography |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Ion Bombardment |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Davies, John A. |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A13320 s C |
