621.381 / R279
Reliability of MEMS : testing of materials and devices / edited by Osamu Tabata and Toshiyuki Tsuchiya .- Germany: Wiley-Vch, 2013 .- xx, 303p . .- ( Advanced Micro And Nanosystems
ISBN: 9783527335015
Subject Headings:
Microelectromechanical systems -- Reliability.;
MEMS.;
Author Added Entry:
Tabata, Osamu, Ed.;
Toshiyuki, Tsuchiya, Ed.;
Copy Details:
Acc. No.: A180313, Full Call No.: 621.381 R279, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Reliability of MEMS : testing of materials and devices / edited by Osamu Tabata and Toshiyuki Tsuchiya .- Germany: Wiley-Vch, 2013 .- xx, 303p . .- ( Advanced Micro And Nanosystems
ISBN: 9783527335015
Subject Headings:
Microelectromechanical systems -- Reliability.;
MEMS.;
Author Added Entry:
Tabata, Osamu, Ed.;
Toshiyuki, Tsuchiya, Ed.;
Copy Details:
Acc. No.: A180313, Full Call No.: 621.381 R279, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------