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621.38152 / C682s3
Colinge, Jean-Pierre
       Silicon on insulator : material to VLSI / Jean-Pierre Colinge .- 3rd .- London: Springer, 1997 .- x, 366p .
ISBN: 079238007X
Subject Headings:
Semiconductors;
Silicon-on-insulator technology;
Integrated circuits -- Very large scale integration -- Materials;
Copy Details:
Acc. No.: A179178, Full Call No.: 621.38152 C682s3, Item type: Books , Location: General Stacks,
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