621.381 / L626
LIGA and its applications / edited by Volker Saile...[et al.] .- Weinheim: Wiley-Vch Verlag, 2009 .- x,479p . .- ( Advanced Micro And Nanosystems / Edited By O. Brand V.7
ISBN: 9783527316984
Subject Headings:
Microelectromechanical systems;
Author Added Entry:
Saile, Volker, Ed.;
Copy Details:
Acc. No.: A164530, Full Call No.: 621.381 L626, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
LIGA and its applications / edited by Volker Saile...[et al.] .- Weinheim: Wiley-Vch Verlag, 2009 .- x,479p . .- ( Advanced Micro And Nanosystems / Edited By O. Brand V.7
ISBN: 9783527316984
Subject Headings:
Microelectromechanical systems;
Author Added Entry:
Saile, Volker, Ed.;
Copy Details:
Acc. No.: A164530, Full Call No.: 621.381 L626, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------