621.381 / L74p
Liu, Ai-Qun
Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu .- Boca Raton: Crc Press, 2009 .- 483p . .- ( Optical Science And Engineering Series No.136
ISBN: 9781420045680 (hb.)
Subject Headings:
Microelectromechanical systems;
Author Added Entry:
Zhang, Xuming;
Copy Details:
Acc. No.: A165019, Full Call No.: 621.381 L74p, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Liu, Ai-Qun
Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu .- Boca Raton: Crc Press, 2009 .- 483p . .- ( Optical Science And Engineering Series No.136
ISBN: 9781420045680 (hb.)
Subject Headings:
Microelectromechanical systems;
Author Added Entry:
Zhang, Xuming;
Copy Details:
Acc. No.: A165019, Full Call No.: 621.381 L74p, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------