621.381 / M583O
Motamedi,Manouchehr E.
MOEMS / MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS .- Spie-The International Soc. For Optical Engg., Washington, 2005 .- xxi,614 .
ISBN: 0819450219
Subject Headings:
Microelectromechanical Systems;
Optoelectronic Devices;
Microfabrication;
Copy Details:
Acc. No.: A151629, Full Call No.: 621.381 M583O, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Motamedi,Manouchehr E.
MOEMS / MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS .- Spie-The International Soc. For Optical Engg., Washington, 2005 .- xxi,614 .
ISBN: 0819450219
Subject Headings:
Microelectromechanical Systems;
Optoelectronic Devices;
Microfabrication;
Copy Details:
Acc. No.: A151629, Full Call No.: 621.381 M583O, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------