621.38152 / SC27O
Ohmi,Tadahiro
SCIENTIFIC WET PROCESS TECHNOLOGY FOR INNOVATIVE LSI/FPD MANUFACTURING / .- Crc Press, Boca Raton, 2006 .- xiii,386 .
ISBN: 0849335434
Subject Headings:
Semiconductors -- Design And Construction;
Semiconductors -- Cleaning;
Integrated Circuits -- Design And Construction;
Copy Details:
Acc. No.: A155221, Full Call No.: 621.38152 SC27O, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Ohmi,Tadahiro
SCIENTIFIC WET PROCESS TECHNOLOGY FOR INNOVATIVE LSI/FPD MANUFACTURING / .- Crc Press, Boca Raton, 2006 .- xiii,386 .
ISBN: 0849335434
Subject Headings:
Semiconductors -- Design And Construction;
Semiconductors -- Cleaning;
Integrated Circuits -- Design And Construction;
Copy Details:
Acc. No.: A155221, Full Call No.: 621.38152 SC27O, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------