621.044 / M289P
Makabe,T.
PLASMA ELECTRONICS / APPLICATIONS IN MICROELECTRONIC DEVICE FABRICATION .- Taylor & Francis, New York, 2006 .- 339 . .- ( Series In Plasma Physics
ISBN: 0750309768
Subject Headings:
Plasma Engineering;
Author Added Entry:
Petrovic,Z.;
Copy Details:
Acc. No.: A155533, Full Call No.: 621.044 M289P, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Makabe,T.
PLASMA ELECTRONICS / APPLICATIONS IN MICROELECTRONIC DEVICE FABRICATION .- Taylor & Francis, New York, 2006 .- 339 . .- ( Series In Plasma Physics
ISBN: 0750309768
Subject Headings:
Plasma Engineering;
Author Added Entry:
Petrovic,Z.;
Copy Details:
Acc. No.: A155533, Full Call No.: 621.044 M289P, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------