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621.381 / SE28P
Sedky,Sherif
       POST-PROCESSING TECHNIQUES FOR INTEGRATED MEMS / .- Artech House, Boston, 2006 .- xiv,207 . .- ( Microelectromechanical Systems Series
ISBN: 1580539017
Subject Headings:
Microelectromechanical Systems;
Copy Details:
Acc. No.: A155566, Full Call No.: 621.381 SE28P, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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