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671.7 / H191P
Andre No Anders
       HANDBOOK OF PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION / .- John Wiley, New York, 2000 .- xxiii,736 .
ISBN: 0471246980
Subject Headings:
Ion Implantation;
Ion Bombardment -- Industrial Applications;
Plasma (Ionized Gases);
Author Added Entry:
Anders,Andre;
Copy Details:
Acc. No.: A132960, Full Call No.: 671.7 H191P, Item type: Books , Location: General Stacks,
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