621.38152 / H637P
Hitchon,W. N.G.
PLASMA PROCESSES FOR SEMICONDUCTOR FABRICATION / .- Cambridge Univ. Press, Cambridge, 1999 .- ix,221 . .- ( Cambridge Studies In Semiconductor Physics And Microelectronic Engineering
Includes Bibliographical References And Index
ISBN: 0521591759
Subject Headings:
Semiconductors -- Ething;
Plasma Ething;
Copy Details:
Acc. No.: A128874, Full Call No.: 621.38152 H637P, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Hitchon,W. N.G.
PLASMA PROCESSES FOR SEMICONDUCTOR FABRICATION / .- Cambridge Univ. Press, Cambridge, 1999 .- ix,221 . .- ( Cambridge Studies In Semiconductor Physics And Microelectronic Engineering
Includes Bibliographical References And Index
ISBN: 0521591759
Subject Headings:
Semiconductors -- Ething;
Plasma Ething;
Copy Details:
Acc. No.: A128874, Full Call No.: 621.38152 H637P, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------