621.3817 / B784p
Brodie, Ivor
PHYSICS OF MICROFABRICATION / .- New York: Plenum Press, 1982 .- xix,503 .
Subject Headings:
Microelectronics;
Thinfilm Circuits;
Author Added Entry:
Muray, Julius J.;
Copy Details:
Acc. No.: A80470, Full Call No.: 621.3817 B784p, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Brodie, Ivor
PHYSICS OF MICROFABRICATION / .- New York: Plenum Press, 1982 .- xix,503 .
Subject Headings:
Microelectronics;
Thinfilm Circuits;
Author Added Entry:
Muray, Julius J.;
Copy Details:
Acc. No.: A80470, Full Call No.: 621.3817 B784p, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------